DEVELOPMENT OF MEMS-BASED SENSORS FOR BIOMEDICAL APPLICATIONS

Abstract

Microelectromechanical systems (MEMS) have become a foundational technology in biomedical engineering due to their capability to integrate mechanical structures, sensing elements, and electronic circuitry on a microscale platform. The growing emphasis on continuous health monitoring, early diagnosis, and personalized medical care has significantly increased demand for compact, low-power, and highly sensitive biomedical sensors. This research presents a comprehensive study on the development of MEMS- based sensors for biomedical applications, focusing on both physiological and biochemical sensing. The paper details sensor design principles, microfabrication techniques, material considerations, signal conditioning strategies, and performance evaluation under simulated physiological conditions. A silicon- based piezoresistive MEMS pressure sensor and a microcantilever-based biosensor are developed as representative case studies. Experimental results demonstrate high sensitivity, stable linear response, and acceptable repeatability within clinically relevant operating ranges. Challenges related to biocompatibility, biofouling, packaging, and long-term reliability are critically examined. The study concludes that MEMS- based biomedical sensors offer substantial advantages over conventional sensing technologies and represent a key enabling technology for next-generation wearable, implantable, and point-of-care medical devices.